Peculiarities of Photoluminescence in Porous Silicon Prepared by Metal-Assisted Chemical Etching
نویسندگان
چکیده
منابع مشابه
Metal-assisted chemical etching in HFÕH2O2 produces porous silicon
A simple and effective method is presented for producing light-emitting porous silicon ~PSi!. A thin (d,10 nm! layer of Au, Pt, or Au/Pd is deposited on the ~100! Si surface prior to immersion in a solution of HF and H2O2 . Depending on the type of metal deposited and Si doping type and doping level, PSi with different morphologies and light-emitting properties is produced. PSi production occur...
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Porous silicon was successfully prepared using metal-assisted chemical etching method. The Effect of HF/H2O2 concentration in etching solution as an affecting parameter on the prepared porosity type and size was investigated. Field emission electron microscopy (FE-SEM) confirmed that all etched samples had porous structure and the sample which was immersed into HF/H2O2 withmolar ratio of 7/3.53...
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Many potential applications of porous silicon nanowires (SiNWs) fabricated with metal-assisted chemical etching are highly dependent on the precise control of morphology for device optimization. However, the effects of key etching parameters, such as the amount of deposited metal catalyst, HF-oxidant molar ratio (χ), and solvent concentration, on the morphology and etching kinetics of the SiNWs...
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In this paper metal-assisted chemical etching has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer. In order to define silicon nanostructures, Metal-assisted chemical etching (MaCE) was carried out with silver catalyst. Provided solution (or materiel) in combination with laser interference lithogr...
متن کاملFabrication of porous silicon-based optical sensors using metal-assisted chemical etching
Porous silicon (PSi) is a versatile nanomaterial which has been utilized in several applications such as optical switching, drug delivery and sensors since its discovery in 1991. This material has been extensively investigated as an optical sensor due to its high surface area, high sensitivity and variety of optical transduction possibilities, e.g. changes in uorescence or reectance (interfer...
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ژورنال
عنوان ژورنال: ISRN Optics
سال: 2012
ISSN: 2090-7826
DOI: 10.5402/2012/958412